P7 Stress Measurement

Updated on 10/9/2014

• NOTE: If you make a stress measurement, you need to log-in an administrator account. Ask the staff for help.

Contents

1 The "Catalog" Window

2 Load Sample

3 Pre- and Post-Stress measurements

3.1 Pre-measurement

3.2 Post-measurement

4 Calculation of Film Stress

5 Print Data

6 Unload Sample

1. The "Catalog" Window

1. You will see the "Catalog" window.

2. Click the light-blue "Stress" icon on the right side, and the "Scan Recipe" button on the left side.

• Stress measurement option is available for P7 2D&3D profiler, but not for P7 2D profiler.
• Stress measurement is only 2D scan.

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2. Load Sample

1. Open the front door.

2. Ensure that a sample chuck is in a loading position (close to the window).

3. If not, choose and click "Manual Load" from the drop-down menu of "Sample" in the Menu.

4. The sample chuck is moved automatically to the loading position.

5. Screw three short threaded-rods into the threads on the chuck, according to the size of sample (the size is shown on the chuck).

6. Replace the short three pins in the notches by the long ones.

7. Place a wafer on the threaded-rods, and the flat and left side of the wafer are positioned against the long pins.

• This ensures that the wafer is loaded in the correct orientation and location for the pre- and post-measurements.
• The blank wafer is measured as a back ground in the pre-measurement, and then some film deposited on the wafer is measured in the post-measurement.

8. Close the front door.

9. Choose and click "Manual Load" from the drop-down menu of "Sample" in the Menu again.

10. The sample chuck is moved automatically beneath the stylus.

3. Pre- and Post-Stress measurements

• The substrate for the pre- and post measurements must be the same.
• The procedure of the both measurements is the same, but the data is saved as pre-scan or post-scan data in the end.

3.1 Pre-measurement

• It is assumed that a blank wafer is loaded.

3.2 Post-measurement

• It is assumed that the wafer, which some film is deposited on, is loaded.

4. Calculation of Film Stress

1. Ensure that the pre- and post-scan data is shown in the Pre ans Post Scan box.

• If not, choose the data, and click the "Set Pre" or "Set Post" button.

2. Click the "Calculate" button.

3. The "Film Thickness" dialog box appears. Enter the film thickness.

4. The calculated result is shown.

5. Print Data

1. Click the "Printer" icon in the menu on the "Stress" screen.

2. Choose how to print or output the data.

6. Unload Sample

1. Choose and click "Manual Load" from the drop-down menu of "Sample" in the Menu.

2. The sample chuck is moved automatically to the loading position.

3. Take out your sample.

4. Remove the three threaded-rods and pins from the chuck.

5. Insert the short pins into the notches.

6. Close the front door.