P7 2D and 3D Stylus Profiler

Standard Operating Procedure

Updated on 4/18/2015

Contents

1 Check-in

2 2D Scan

3 3D Scan

4 Stress Measurement

5 Check-out

6 Supplemental Documents

1. Check-in

1. Log-in on the ISIS scheduler

2. Log-in the PC, if necessary.

• This is an account for the PC, but not for the local software.
• If you make a stress measurement, you need to log-in an administrator account. Ask the staff for help.

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2. Double-click the "Profiler 7.45" icon on the desktop screen, if the software is not opened.

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3. Click the "Scan Recipe" button on the Catalog screen shown below.

4. Choose "2D" or "3D" from the menu.

* P7 2D stylus profiler does not have the "3D" button.

5. If you want to measure the step height, then click the icon on the right side of the screen.

6. If you want to measure the film stress, then click the icon on the right side of the screen.

* P7 2D stylus profiler does not show the icon. 

2. 2D Scan

3. 3D Scan

4. Stress Measurement

5. Check-out

1. Log-out on the ISIS scheduler

6. Supplemental Documents