Zygo 3D Optical Profiler Standard Operating Procedure

Updated on 1/7/2015

Contents

1 Start Up

2 Measurement

2.1 Surface Structure and Roughness Measurement

2.2 Step Height Measurement

2.3 Transparent or Semi-transparent Film Measurement

2.4 Stitching Measurement

3 Inspect Data

4 Save/Print Result

4.1 Raw Data

4.2 A Screen Shot

4.3 Process Stats

5 Shut Down

6 Supplemental Documents

1. Start Up

1. Log-in on the ISIS scheduler.

2. Ensure that the objective lenses are NOT close to the sample stage.

2. Click the "MetroPro" icon on the PC.

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3. The "MetroPro" is opened.

4. If the LED of "Z-stop" button is in red, press it to blink the LED for releasing the stopper.

2. Measurement

• Refer to the training document (UPenn_Training_rev4‎).

2.1 Surface Structure and Roughness Measurement

• This is the application for a normal operation.

2.2 Step Height Measurement

• This is useful to measure a step height of opaque materials.

2.3 Transparent or Semi-transparent Film Measurement

• This is useful to measure 750 nm - 50 µm thick transparent or semi-transparent films, e.g.developed resist films.

2.4 Stitching Measurement

• This is useful to measure an area larger than the field of view.

3. Inspect Data

1. Click on the plot with the middle mouse button, or right-click on the plot to open the plot menu window.

• See the detail of Section 7 "Filled Plot and Profile Plot" in Zygo Reference guide.

2. Choose "Show controller" to open the plot controller.

3. Inspect the Data using the plot controller.

• The inspect feature is used to examine areas of interest in the plot.
• It incorporates three parts of the plot Controller, the Inspect button, the Inspect Readouts, and the Level button.

Note:

• Crosshairs are only displayed when the Controller is open and the Inspect button is on Inspector 1, Inspector 2, or Calipers.
• The angle of the data (between the Inspectors) must be between ±45° or ±135° of the X-Axis for Level to operate correctly.

4. Save/Print Result

4.1 Raw Data

1. Click the "Save Data" button.

2. In the file handler, enter a name for the file ending with “.dat”.

4.2 A Screen Shot

1. Click the "Zygo" button on the upper left corner of the application.

2. The "Print Panel" dialog box appears.

3. Choose File, .bmp, Color from the Print Panel then click Print.

4. Save the file with a .bmp extension.

4.3 Process Stats

1. Click the process icon to open the process window.

2. To save a series of data as a txt or csv file, press the "zygo" button and choose to print to a file.

5. Shut Down

1. Ensure that the objective lenses are moved up to the limit or home position.

2. Press "Z-stop" on the joystick, so that the microscope does not go down.

3. Close the "MetroPro" software.

4. Log-out on the ISIS scheduler.

6. Supplemental Documents