Standard Operating Procedures of Tools in

Quattrone Nanofabrication Facility

Updated on 1/26/2021

1. Introduction

1. Introduction to Nanofabrication
2. Introduction to Soft Lithography

2. Film Coating

1. Spinners
2. Suss MicroTec AS8 AltaSpray
3. Resists and Their Supplements

3. Lithography Tools

1. Elionix E-beam Writer
2. MA6 Mask Aligner
3. Nanonex NX2600 Nanoimprint
4. ABM3000HR Mask Aligner
5. Heidelberg DWL66+ Laser Writer (Photomask Writer)
6. NanoScribe 3D Printer

4. Thin Film Deposition

1. Cambridge Nanotech S200 ALD
2. Oxford PlasmaLab 100 PECVD
3. Sandvik LPCVD/Oxidation/Anneal Furnace
4. Lesker Nano-36 Thermal Evaporator
5. Lesker PVD75 E-beam/Thermal Evaporator
6. Lesker PVD75 DC/RF Magnetron Sputterer
7. Lesker PVD75 E-beam Evaporator
8. Explorer14 Magnetron Sputterer
9. SCS PDS2010 Parylene Coater

5. Etching

1. Anatech SCE-108 Barrel Asher
2. SPTS Si DRIE
3. Oxford 80 Plus RIE
4. Oxford Cobra ICP Etcher
5. SPTS/Xactix XeF2 Isotropic Etcher
6. Anatech SCE-106 Barrel Asher
7. March Jupiter II

6. Packaging

1. EVG 510 Wafer Bonder
2. EVG 620 Wafer Bond Aligner
3. K&S Wire Bonder
4. ADT 7100 Dicing Saw

7. Metrology Tools

1. Micromanipulation 4060 Probe Station
2. KLA Tencor P7 2D profilometer
3. KLA Tencor P7 2D&3D/stress profilometer
4. Filmetrics F50
5. Filmetrics F40
6. Zygo NewView 7300 Optical Profilometer
7. Zeiss Smartzoom5 2D/3D Optical Microscope
8. Zeiss Imager-M2m Optical Microscope
9. Woollam VAS Ellipsometer

8. Wet Processing

1. Wet Benches
2. Spinner Benches
3. Wet Processing

9. Laser Micromachining

1. Green/IR Laser Micromachining
2. Excimer Laser Micromachining

10. Other

1. Dimatix ink-jet printer
2. Spin Rinse Dryer
3. Critical Point Dryer
4. RTS-600S Rapid Thermal Annealer