Standard Operating Procedures of Tools in

Quattrone Nanofabrication Facility

Updated on 3/16/2017

 

1. Introduction

  1. Introduction to Nanofabrication
  2. Introduction to Soft Lithography

 

2. Film Coating

  1. Spinners
  2. Suss MicroTec AS8 AltaSpray
  3. Resists and Their Supplements

 

3. Lithography Tools

  1. Elionix E-beam Writer
  2. MA6 Mask Aligner
  3. Nanonex NX2600 Nanoimprint/Mask Aligner
  4. ABM3000HR Mask Aligner
  5. Heidelberg DWL66+ Laser Writer (Photomask Writer)
  6. NanoScribe 3D Printer

 

4. Thin Film Deposition

  1. Cambridge Nanotech S200 ALD
  2. Oxford PlasmaLab 100 PECVD
  3. Lesker Nano-36 Thermal Evaporator
  4. Lesker PVD75 E-beam/Thermal Evaporator
  5. Lesker PVD75 DC/RF Magnetron Sputterer
  6. Lesker PVD75 E-beam Evaporator
  7. Explorer14 Magnetron Sputterer
  8. SCS PDS2010 Parylene Coater

 

5. Etching

  1. Technics RIE
  2. Anatech SCE-108 Barrel Asher
  3. SPTS Si DRIE
  4. Oxford 80 Plus RIE
  5. Trion Phantom ICP
  6. SPTS/Xactix XeF2 Isotropic Etcher
  7. Anatech SCE-106 Barrel Asher

 

6. Packaging

  1. EVG 510 Wafer Bonder
  2. EVG 620 Wafer Bond Aligner
  3. K&S Wire Bonder
  4. ADT 7100 Dicing Saw

 

7. Metrology Tools

  1. Four Point Probe
  2. Probe Station
  3. DI Dimension 3000 AFM
  4. KLA Tencor P7 2D profilometer
  5. KLA Tencor P7 2D&3D/stress profilometer
  6. Filmetrics F50
  7. Filmetrics F40
  8. Zygo NewView 7300 Optical Profilometer
  9. Zeiss Smartzoom5 2D/3D Optical Microscope
  10. Zeiss Imager-M2m Optical Microscope
  11. Woollam VAS Ellipsometer
  12. Rudolph Ellipsometer AutoEL IV
  13. IR Transmission Imaging

 

8. Wet Processing

  1. Wet Benches
  2. Spinner Benches
  3. Wet Processing

 

9. Laser Micromachining

  1. Green/IR Laser Micromachining
  2. Excimer Laser Micromachining

 

10. Other

  1. Dimatix ink-jet printer
  2. YES oven
  3. Spin Rinse Dryer
  4. Critical Point Dryer